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Titlebook: Atomic Layer Deposition for Semiconductors; Choel Seong Hwang Book 2014 Springer Science+Business Media New York 2014 ALD for mass-product

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發(fā)表于 2025-3-21 20:07:30 | 只看該作者 |倒序?yàn)g覽 |閱讀模式
期刊全稱(chēng)Atomic Layer Deposition for Semiconductors
影響因子2023Choel Seong Hwang
視頻videohttp://file.papertrans.cn/165/164739/164739.mp4
發(fā)行地址First book to connect missing link between semiconductor device engineers/designers and process engineers, material designers, and chemists.First book solely dedicated to the application of ALD to the
圖書(shū)封面Titlebook: Atomic Layer Deposition for Semiconductors;  Choel Seong Hwang Book 2014 Springer Science+Business Media New York 2014 ALD for mass-product
影響因子This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for memories covers both mass-produced memories, such as DRAM and Flash, and emerging memories, such as PCRAM and FeRAM. The section on ALD for logic devices covers both front-end of the line processes and back-end of the line processes. The final section on ALD for machines looks at toolsets and systems hardware. Each chapter provides the history, operating principles, and a full explanation of ALD processes for each device.
Pindex Book 2014
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Erratum to: Atomic Layer Deposition for Semiconductors,
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https://doi.org/10.1007/978-3-030-04729-0, sulfides, selenides and tellurides of some elements, and phosphides, arsenides, carbides, and fluorides of few elements. The mechanisms of ALD reactions involve the transfer of atoms between precursor vapors and surfaces. The transferred atoms are either hydrogen, oxygen, fluorine, or chlorine.
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The Militaristic Discourse of Anti-feminism,entional Si substrate, which is also discussed. Finally, various state-of-the-art devices with ALD high-k film such as Ge and III–Vs-based metal–oxide–semiconductor field effect transistors (MOSFETs) and three-dimensional MOSFETs are introduced, and their reliability characteristics are discussed.
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