Titlebook: Atomic Layer Deposition for Semiconductors; Choel Seong Hwang Book 2014 Springer Science+Business Media New York 2014 ALD for mass-product

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書目名稱Atomic Layer Deposition for Semiconductors影響因子(影響力)




書目名稱Atomic Layer Deposition for Semiconductors影響因子(影響力)學(xué)科排名




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書目名稱Atomic Layer Deposition for Semiconductors被引頻次




書目名稱Atomic Layer Deposition for Semiconductors被引頻次學(xué)科排名




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書目名稱Atomic Layer Deposition for Semiconductors年度引用學(xué)科排名




書目名稱Atomic Layer Deposition for Semiconductors讀者反饋




書目名稱Atomic Layer Deposition for Semiconductors讀者反饋學(xué)科排名

痛苦一生

沒有希望

慢慢沖刷

vocation

Erratum to: Atomic Layer Deposition for Semiconductors,

dominant

Resection

https://doi.org/10.1007/978-3-030-04729-0, sulfides, selenides and tellurides of some elements, and phosphides, arsenides, carbides, and fluorides of few elements. The mechanisms of ALD reactions involve the transfer of atoms between precursor vapors and surfaces. The transferred atoms are either hydrogen, oxygen, fluorine, or chlorine.

prodrome

nonchalance

The Militaristic Discourse of Anti-feminism,entional Si substrate, which is also discussed. Finally, various state-of-the-art devices with ALD high-k film such as Ge and III–Vs-based metal–oxide–semiconductor field effect transistors (MOSFETs) and three-dimensional MOSFETs are introduced, and their reliability characteristics are discussed.

Texture