Titlebook: Metal Impurities in Silicon-Device Fabrication; Klaus Graff Book 19951st edition Springer-Verlag Berlin Heidelberg 1995 Scandium.Tantal.ch

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Klaus Grafftions usually face considerably technical di?culties and in a number of instances are exceedingly expensive. It is precisely for these reasons that it is important to - velop and re?ne in a systematic manner qu978-3-7643-7346-7Series ISSN 1544-9998 Series E-ISSN 2197-1846

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Klaus Grafffor each host. More recently, evidence of positive selection has also been obtained from these studies. However, experimental model systems employing arthropod and vertebrate cell cultures have yielded conflicting conclusions on the effect of alternating host infections, with host specialization inc

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Klaus Graffher hand, expe- ments aimed at generating data on properties of matter under extreme conditions usually face considerably technical di?culties and in a number of instances are exceedingly expensive. It is precisely for these reasons that it is important to - velop and re?ne in a systematic manner qu

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her hand, expe- ments aimed at generating data on properties of matter under extreme conditions usually face considerably technical di?culties and in a number of instances are exceedingly expensive. It is precisely for these reasons that it is important to - velop and re?ne in a systematic manner qu

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Book 19951st editionfferent mechanisms responsible for contamination are discussed, and a survey given of their impact on device performance. The specific properties of main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. Finally, impurity gettering i

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