Titlebook: Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators; Gerhard Lammel,Sandra Schweizer,Philippe Renaud Book 2002 Sp

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Introduction,tical interference plates. These devices, as part of the so-called MOEMS (Micro Opto Electro Mechanical Systems) family, are primarily intended to be used as key components for linear and two-dimensional light beam scanning as well as for tunable optical filters.

Deadpan

Two-Dimensional Microscanner,he electrical path is incorporated on one beam. The high sensitivity of the thermal bimorph actuator allows a slow (non-resonant) movement of the scanner in one direction. This movement is mainly created by the large deflection of the long part of the beam and the scanner rotates around the .-axis (