Titlebook: Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators; Gerhard Lammel,Sandra Schweizer,Philippe Renaud Book 2002 Sp

即席

978-1-4419-4946-2Springer Science+Business Media New York 2002

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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators978-1-4757-6083-5Series ISSN 1389-2134

OWL

Book 2002 technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the syst

Mere僅僅

Micromachining Using Porous Silicon,anding layers of porous Si to separate concentric microchannels [229] and uses isotropic electropolishing to micromachine buried microchannels [230]. All the devices have in common that they are mechanically static.

follicle

Tunable Optical Filter and IR Gas Spectroscopy,° out of plane. This angle can be increased with a longer actuator. Experiments with different thicknesses of the porous Si layer show that the plate begins to warp when it is thinner than 15 μm and is difficult to lift up when it is thicker than 40 μm, because the actuator gets also thicker and more rigid.

極小

Evolve

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Advanced Optical Filters of Porous Silicon,e layer formation by electrochemical etching. To fabricate an optical filter the etch current is varied over time according to the desired refractive index profile of the layer stack. With this technology, optical filters of porous silicon can be produced within minutes in a single process step that generates a modulated density (Fig. 6.1).

怪物

CULP

se zu Steingr??e, Lokalisation und Dichte. Es gibt verschiedene bildgebende Verfahren, die für die Diagnostik der Urolithiasis verwendet werden k?nnen. Die Bildgebung der Urolithiasis hat sich über die Jahre substanziell weiterentwickelt. Früher waren konventionelle R?ntgenaufnahmen und die intraven