Titlebook: Nanoimprint Lithography: An Enabling Process for Nanofabrication; Weimin Zhou Book 2013 Springer-Verlag Berlin Heidelberg 2013 Light Emitt

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Stamp Surface Treatment,referred to as demolding. Subsequent processes, such as plasma etching and lift-off, are applied for the pattern transferring [1]. The schematic of the nanoimprint lithography processes is given in Fig. 4.1.

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Application of NIL in Solar Cell, the real applications of solar energy. “New Sunshine Project” started in 1993, and the incentive program “Residential PV System Dissemination Program” began in 1994 [2]. China has also taken effective measures to promote the development of solar cell.

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ofabrication and nanotechnology.Includes approximately 200 fNanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emergi

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