Titlebook: Nanofabrication; Principles, Capabili Zheng Cui Book 2024Latest edition The Editor(s) (if applicable) and The Author(s), under exclusive li

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Systemic

Nanofabrication by Focused Ion Beam,f both features are explained and four typical usages of FIB are presented, including FIB inspecting and editing integrated circuits, repairing photomasks, preparing TEM/STEM samples, and nanostructuring for scientific research.

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Nanoscale Pattern Transfer by Etching,as loading, trenching, notching, micromasking effects, etc. Other novel etching techniques such as metal assisted chemical etching (MACE) and atomic layer etching (ALE) are also presented. Finally, physical etching by ion milling is described.

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https://doi.org/10.1007/978-3-031-62546-6Additive nanomanufacturing; Electron beam lithography; Indirect nanofabrication; Microfabrication; Nanof

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Zheng CuiContains most of the nanofabrication techniques encountered in both industrial applications and scientific research.Presents less theoretical and more practical information and examples from the autho