Titlebook: Defects and Impurities in Silicon Materials; An Introduction to A Yutaka Yoshida,Guido Langouche Book 2015 Springer Japan 2015 Atomistic In

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Alexandra Kautzky-Willer,W. Waldh?usld, e.g. the analogy between the chemistry of ions in water as a “substrate” and the “chemistry” of point defects in silicon, the most perfect, purest solid material available. Secondly, the application of these fundamental defect engineering principles will be described for various technology areas.

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Nuclear Methods to Study Defects and Impurities in Si Materials,e site location of the probe atoms from the channelling behaviour of the particles emitted by these probe nuclei..In the first part of this chapter we will describe the basic principles of these nuclear methods and illustrate them with a few relevant examples..In the second part of this chapter we w