Titlebook: Chemical Vapor Deposition; Thermal and Plasma D Srinivasan Sivaram Book 1995 Springer Science+Business Media New York 1995 chemistry.deposi

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Andrew Eberhard,Robin Hill,Barney M. Glovert in the vapor phase. Ability to control the components of the gas phase, and the physical conditions of the gas phase, the solid surface, and the envelope that surrounds them determines our capability to control the properties of the thin films that are produced.

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Recent Progress in Particle Physics, to the existence of a stable native dielectric, SiO.. SiO. is used as the gate oxide in MOS devices, where it dictates their performance. Dielectrics are used to isolate electrically active components, either semiconductors or conductors. And they are used as capacitors; they provide protection for the device from ambient impurities and moisture.

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