Titlebook: Auger- and X-Ray Photoelectron Spectroscopy in Materials Science; A User-Oriented Guid Siegfried Hofmann Book 2013 Springer-Verlag Berlin H

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Instrumentation, section of a typical XPS instrument and Fig.2.1b that of a typical AES spectrometer. The main parts are (1) the specimen on a sample holder with . movement stage, (2) an excitation source (X-ray source for XPS, electron gun for AES), (3) the electron energy analyzer with detector, and (4) an auxili

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Quantitative Analysis (Data Evaluation), a measured spectrum. Mainly depending on the tolerable uncertainty in the respective analytical task, the signal intensity is obtained by application of more or less elaborate procedures to the raw data, as outlined in the next paragraph (Sect.4.1). Section 4.2 presents the basic tools for quantifi

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