| 書目名稱 | Plasma Processing of Semiconductors | | 編輯 | P. F. Williams | | 視頻video | http://file.papertrans.cn/750/749139/749139.mp4 | | 叢書名稱 | NATO Science Series E: | | 圖書封面 |  | | 描述 | .Plasma Processing of Semiconductors. contains 28contributions from 18 experts and covers plasma etching, plasmadeposition, plasma-surface interactions, numerical modelling,plasma diagnostics, less conventional processing applications ofplasmas, and industrial applications. ..Audience:. Coverage ranges from introductory to state of the art,thus the book is suitable for graduate-level students seeking anintroduction to the field as well as established workers wishing tobroaden or update their knowledge. | | 出版日期 | Book 1997 | | 關(guān)鍵詞 | Plasma; collision; dusty plasma; integrated circuit; optics; photoelektrochemische Zelle; plasma etching; p | | 版次 | 1 | | doi | https://doi.org/10.1007/978-94-011-5884-8 | | isbn_softcover | 978-94-010-6486-6 | | isbn_ebook | 978-94-011-5884-8Series ISSN 0168-132X | | issn_series | 0168-132X | | copyright | Springer Science+Business Media Dordrecht 1997 |
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