| 書目名稱 | Physical Chemistry of, in and on Silicon | | 編輯 | Gianfranco Cerofolini,Laura Meda | | 視頻video | http://file.papertrans.cn/747/746835/746835.mp4 | | 叢書名稱 | Springer Series in Materials Science | | 圖書封面 |  | | 描述 | The aim of this book is twofold: it is intended for use as a textbook for a ~ourse on electronic materials (indeed, it stems from a series of lectures on this topic delivered at Milan Polytechnic and at the universities of Modena and Parma), and as an up-to-date review for scientists working in the field ::>f silicon processing. Although a number of works on silicon are already available, the vast amount of existing and new data on silicon properties are nowhere adequately summarized in a single comprehensive report. The present volume is intended to fill this gap. Most of the examples dealt with are taken from the authors‘ every- day experience, this choice being dictated merely by their greater knowl- edge of these areas. Certain aspects of the physics of silicon have not been included; this is either because they have been treated in standard textbooks (e.g. the inhomogeneously doped semiconductor and the chem- istry of isotropic or preferential aqueous etching of silicon), or because they are still in a rapidly evolving phase (e.g. silicon band-gap engineering, generation-recombination phenomena, cryogenic properties and the chem- istry of plasma etching). In line with the stan | | 出版日期 | Textbook 1989 | | 關(guān)鍵詞 | chemistry; defects; oxidation; physical chemistry; silicon; surface | | 版次 | 1 | | doi | https://doi.org/10.1007/978-3-642-73504-2 | | isbn_softcover | 978-3-642-73506-6 | | isbn_ebook | 978-3-642-73504-2Series ISSN 0933-033X Series E-ISSN 2196-2812 | | issn_series | 0933-033X | | copyright | Springer-Verlag Berlin Heidelberg 1989 |
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