Titlebook: Optical Measurement of Surface Topography; Richard Leach Book 2011 Springer-Verlag Berlin Heidelberg 2011 Confocal microscopy.Instrument c

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Point Autofocus Instruments,nning stage. A point autofocus instrument is capable of measuring various surfaces with different surface properties, such as reflectivity, colour and slope angle, with high resolution and high accuracy. This chapter presents the basic principles of point autofocus instruments, their instrumentation

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Coherence Scanning Interferometry,chanism for 3D measurement and surface characterisation. Coherence scanning interferometry extends interferometric techniques to surfaces that are complex in terms of roughness, steps, discontinuities, and structure such as transparent films. Additional benefits include the equivalent of an autofocu

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Digital Holographic Microscopy,With these features, DHM performs real-time measurements, up to twenty frames per second in live mode, and is only limited by the camera acquisition rate in post processing mode. For periodic displacements, a stroboscopic module enables 3D displacement measurement up to 25 MHz and short laser pulses

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Imaging Confocal Microscopy, of a sequence of confocal images through the depth of focus of the objective. The highest signal within the images of the sequence for each pixel correlates with the height position of the topography. Confocal microscopy has many advantages over other optical techniques such as having a high numeri

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