Titlebook: Nanotechnology for Electronics, Photonics, and Renewable Energy; Anatoli Korkin,Predrag S. Krsti?,Jack C. Wells Book 2010 Springer Science

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On Application of Plasmas in Nanotechnologies,, to applications in nanoelectronics for the manufacture of future generations of integrated circuits to meet the Moore’s law driven semiconductor roadmap. In a text like this it is not possible to cover all issues and even less to cover all sources. We thus focus on several topics and mostly on the

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