Titlebook: Nanopositioning Technologies; Fundamentals and App Changhai Ru,Xinyu Liu,Yu Sun Book 2016 Springer International Publishing Switzerland 201

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Position Sensors for Nanopositioning,n define the linearity, resolution, and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including nonlinearity, drift, and noise. The s

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A Review of Nanomanipulation in Scanning Electron Microscopes,ping/assembly of nanoscale devices. In this chapter, techniques for nanorobotic manipulation in SEMs are reviewed. Nanomanipulation platforms, nanomanipulation tools, gas injection systems, imaging techniques for automation, and applications in nanomaterial characterization and nanodevice assembly a

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Nanopositioning for Lithography and Data Storage,roblem, must be got people’s praise and attraction. Nanotechnology is also facing the similar historical opportunity. Nanotechnology, which is understanding matter and the control of matter at dimensions of 100?nm or less, appeared in recent years [1–4]. The inventions of the scanning tunneling micr

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https://doi.org/10.1007/978-3-319-23853-1Flexure-Guided Nanopositioning; MEMS Nanopositioning; Nanomanipulation; Nanopositioning Applications; Na

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