Titlebook: Nano-Bio- Electronic, Photonic and MEMS Packaging; C.P. Wong,Kyoung-Sik Moon,Yi (Grace) Li Book 20101st edition Springer-Verlag US 2010 Bi

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Book 2003tric materials, Metrology and characterization techniques, Integration, Reliability. This volume will be an invaluable resource for professionals, scientists, researchers and graduate students involved in dielectric technology development, materials science, polymer science, and semiconductor devices and processing.