| 書(shū)目名稱 | Modelling of Microfabrication Systems | | 編輯 | Raja Nassar,Weizhong Dai | | 視頻video | http://file.papertrans.cn/637/636659/636659.mp4 | | 概述 | First book on modelling of the processing techniques for microsystems.Focusses on the fabrication of high-aspect ratio microparts, namely ion beam micromachining, x-ray lithography, laser chemical vap | | 叢書(shū)名稱 | Microtechnology and MEMS | | 圖書(shū)封面 |  | | 描述 | .This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.. | | 出版日期 | Book 2003 | | 關(guān)鍵詞 | Chemical vapor deposition; High Aspect Ratio; Ion beam; Laser ablation; MEMS; Microtechnology; Photopolyme | | 版次 | 1 | | doi | https://doi.org/10.1007/978-3-662-08792-3 | | isbn_softcover | 978-3-642-05536-2 | | isbn_ebook | 978-3-662-08792-3Series ISSN 1615-8326 Series E-ISSN 2365-0680 | | issn_series | 1615-8326 | | copyright | Springer-Verlag Berlin Heidelberg 2003 |
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