| 書目名稱 | Modeling of Chemical Vapor Deposition of Tungsten Films | | 編輯 | Chris R. Kleijn,Christoph Werner | | 視頻video | http://file.papertrans.cn/637/636230/636230.mp4 | | 叢書名稱 | Progress in Numerical Simulation for Microelectronics | | 圖書封面 |  | | 描述 | Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors. This book is the result of two parallel lines of research dealing with the same subject - Modeling of Tungsten CVD processes -, which were per- formed independently under very different boundary conditions. On the one side, Chris Kleijn, working in an academic research environment, was able to go deep enough into the subject to laya solid foundation and prove the validity of all the assumptions made in his work. On the other side, Christoph Werner, working in the context of an industrial research lab, was able to closely interact with manufacturing and development engineers in a modern submicron semiconductor processing line. Because of these different approaches, the informal collaboration during the course of the projects proved to be extremely helpful to both sides, even though - or perhaps because - different computer codes, different CVD reactors and also slightly different models were used. In spite of the inconsistencies which | | 出版日期 | Book 1993 | | 關(guān)鍵詞 | development; modeling; optimization; semiconductor | | 版次 | 1 | | doi | https://doi.org/10.1007/978-3-0348-7741-1 | | isbn_softcover | 978-3-0348-7743-5 | | isbn_ebook | 978-3-0348-7741-1 | | copyright | Springer Basel AG 1993 |
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