Titlebook: Micromachined Circuits and Devices; Microwave to Sub-mil Shiban Kishen Koul,Sukomal Dey Book 2022 The Editor(s) (if applicable) and The Aut

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Future Scope of RF MEMS in THz Regime,rts, first part focusses on different metamaterial based micromachined devices at THz frequency range. Major emphasis is given on the micromachined frequency selective surfaces and absorbers. The second part focusses on the micromachined waveguide-based switches, phase shifters and conductor backed

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Shiban Kishen Koul,Sukomal DeyHighlights the design of different switching and resonant devices using state-of-the-art RF.Discusses different topologies of MEMS switches considering optimum performances.Includes design guidelines

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Micromachined Circuits and Devices978-981-16-9443-1Series ISSN 1876-1100 Series E-ISSN 1876-1119

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Micromachined Microwave Passive Circuits,heir standard semiconductor counterparts. It includes, micromachined coplanar waveguide transmission line, varactors, inductors, power divider, coupler, and impedance matching tuners. Conductor Backed Coplanar Waveguide (CBCPW) lines on Si micromachined substrate are in use for more than a decade and it is given prime emphasis in this Chapter.

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