Titlebook: Microelectronic Test Structures for CMOS Technology; Manjul Bhushan,Mark B. Ketchen Book 2011 Springer Science+Business Media, LLC 2011 Bh

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Test Structure Basics,er dicing and packaging the test structure. The design of test structures is therefore closely coupled to the method of interfacing to the test equipment and the capabilities and limitations of the test equipment itself. Design and test efficiency is improved by standardizing the footprints of each

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Resistors,ured to monitor and control material properties such as film thickness and doping levels in silicon layers. Resistance measurements are utilized in monitoring product yield loss caused by electrical opens in metal wires and inter-level vias, or shorts between neighboring wires. In metrology and for

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Test Structures for SOI Technology, an oxide layer. CMOS circuits fabricated on an SOI substrate have inherent low parasitic source and drain junction capacitance and hence a potential for achieving higher switching speeds relative to circuits fabricated on bulk silicon. Because of electrical isolation and a smaller device volume, th

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Test Equipment and Measurements, characterization of MOSFETs and resistance measurements can be carried out with constant voltage or constant current power supplies, voltmeters, and ammeters. Capacitance measurements, in the absence of any on-chip active circuitry, require dedicated impedance meters operating over a range of frequ

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Manjul Bhushan,Mark B. Ketchen shape and value of human life. South Korea has implemented the national project of building a model smart city that is futuristic and innovative. Two megaprojects are underway the Sejong Administrative City (Sejong 5-1 Life Zone) and the Busan Eco Delta City (Busan Eco Delta Smart City) and have be