Titlebook: Micro and Nano Fabrication; Tools and Processes Hans H. Gatzen,Volker Saile,Jürg Leuthold Textbook 2015 Springer-Verlag Berlin Heidelberg 2

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Hans H. Gatzen,Volker Saile,Jürg Leutholdesents the formalization of advanced knowledge concepts.This book focuses on one of the major challenges of the newly created scientific domain known as data science: turning data into actionable knowledge in order to exploit increasing data volumes and deal with their inherent complexity. Actionabl

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,Introduction—MEMS, a Historical Perspective,ectrical signals to produce sensors and actuators. The first MEMS devices appeared in the early 1960s, soon after the invention of the integrated circuit (IC). A tiny pressure sensor, built by sensing strain on an etched thin-silicon diaphragm is an early example. Extensions of this seminal idea and

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Deposition Technologies,ike evaporation or ion bombardment to create thin-films on a substrate by forcing source atoms into a gaseous phase. Chemical vapor deposition (CVD) and similar processes create coatings by a chemical reaction of volatile species by using reaction processes defined by chemical reaction equations. Wh

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Etching Technologies,anical processes (without or with a chemical contribution). The wet etch attack may be chemical by a liquid etchant or electrochemical (a reversal of electrochemical deposition) by an electrolyte under the influence of a current. In physical dry etching, the substrate is bombarded by ions (ion beam