Titlebook: Metal-Dielectric Interfaces in Gigascale Electronics; Thermal and Electric Ming He,Toh-Ming Lu Book 2012 Springer Science+Business Media, L

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Ming He,Toh-Ming Lud distribution to mobile users of Uncalibrated Phase Delays (UPDs) a network of reference stations. The network can be as small as one station or cover the entire globe. Once applied to the data of a mobile receiver, the carrier ambiguities should be integer. Fixing of these ambiguities to their pro

Bouquet

白楊魚(yú)

0933-033X e literature on metal-dielectric interfaces. The goal is to provide readers with a clear account of the relationship between interface science and its applications in interconnect structures. The material prese978-1-4939-4308-1978-1-4614-1812-2Series ISSN 0933-033X Series E-ISSN 2196-2812

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Ming He,Toh-Ming LuPresents a unified approach to understanding the diverse phenomena observed at metal-dielectric interfaces.Features fundamental considerations in the physics and chemistry of metal-dielectric interact

闡釋

鐵砧

Al-Dielectric Interfaces, it can be easily plasma etched by Cl-based gases, greatly simplifying the patterning steps. Also, Al has excellent compatibility with SiO., the traditional ILD material for larger-feature-size devices.

Obloquy

骯臟

Self-Forming Barriers,Besides the possible incompatibility between traditional metal barriers and porous low-. dielectrics discussed in the previous chapter, there is another problem for the future device shrinkage. It is becoming more and more challenging to incorporate these barriers into future interconnect structures.

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978-1-4939-4308-1Springer Science+Business Media, LLC 2012