Titlebook: Mechanics and Physics of Precise Vacuum Mechanisms; E. A. Deulin,V. P. Mikhailov,R. A. Nevshupa Book 2010 Springer Science+Business Media

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E. A. Deulin,V. P. Mikhailov,Yu. V. Panfilov,R. A. Nevshupahe same role as the state space of an ordinary i/s/o (input/state/ output) system, but it differs from an i/s/o systems in the sense that the interaction signal which connects the system to the outside world has not been divided a priori into one part which is called the “input” and another part whi

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Book 2010hanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way. ..Topics treated include the method of microparticles flow regulation and its determination in vacuum equipment and mechanisms of electronics; precise mechanisms of nanoscale pre

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978-94-007-3106-6Springer Science+Business Media B.V. 2010

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