| 書目名稱 | Mems/Nems | | 副標(biāo)題 | (1) Handbook Techniq | | 編輯 | Cornelius T. Leondes | | 視頻video | http://file.papertrans.cn/621/620127/620127.mp4 | | 概述 | The first comprehensive reference dedicated to the multi-disciplinary area of MEMS / NEMS.100 contributing authors from 19 countries.Comprehensive treatment of MEMS design, fabrication techniques, and | | 圖書封面 |  | | 描述 | .As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. The remarkable breadth and depth of the topi | | 出版日期 | Book 2006 | | 關(guān)鍵詞 | Finite-Elemente-Methode; Rotor; Sensor; communication; design; design methods; development; finite element | | 版次 | 1 | | doi | https://doi.org/10.1007/b136111 | | isbn_softcover | 978-1-4899-7739-7 | | isbn_ebook | 978-0-387-25786-0 | | copyright | Springer-Verlag US 2006 |
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