Titlebook: MEMS Linear and Nonlinear Statics and Dynamics; Mohammad I. Younis Book 2011 Springer Science+Business Media, LLC 2011 MEMS devices.linear

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978-1-4614-2912-8Springer Science+Business Media, LLC 2011

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Elements of Lumped-Parameter Modeling in MEMS,rtia elements, and the damping mechanisms of energy dissipation in microstructures. The forces affecting microstructures due to actuation and detection are another element, which is the subject of Chap.?3. The discussion here is focused mainly on linear modeling; nonlinear modeling is introduced in the following chapter.