Titlebook: Laser-Assisted Microtechnology; Simeon M. Metev,Vadim P. Veiko Book 19941st edition Springer-Verlag Berlin Heidelberg 1994 Laser Microtech

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Springer Series in Materials Sciencehttp://image.papertrans.cn/l/image/581631.jpg

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Laser-Based Equipment for Microtechnology, It initiates a concrete technological process in areas of precisely controllable shape and size. The laser is the main unit of the equipment and its characteristics determine, to a great extent, the qualitative and quantitative parameters of the technological treatment.

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Local Laser-Induced Heat Treatment,allowing local heating of very tiny parts. Secondly, heating rates of up to 10. K/s can be achieved for periods from a few nanoseconds to hundreds of milliseconds. This allows the precise control of thermally-induced structural modifications of material only in the zone under treatment, without affecting the unirradiated areas.

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Springer-Verlag Berlin Heidelberg 1994

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Laser-Assisted Microtechnology978-3-642-97327-7Series ISSN 0933-033X Series E-ISSN 2196-2812

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Maskless Laser Micropatterning,Laser patterning comprises a combination of laser-assisted methods for direct maskless structuring the surface of a solid [7.1–6]. This laser-assisted micro-technological lithographic technique has extensively been investigated, and some of the achievements have already found concrete industrial application [7.1–11].