Titlebook: Laser Heat-Mode Lithography; Principle and Method Jingsong Wei Book 2019 Springer Nature Singapore Pte Ltd. 2019 Phase change.Thermal diffu

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Principles of Laser Heat-Mode Lithography,gy carrier. The lithography transfers both information and energy. On one hand, the light can transfer information into photoresists to form pattern structures based on the function of information carrier of light; on the other hand, the feature size of pattern structures can be reduced based on the

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Laser Heat-Mode Grayscale Lithography, energy is absorbed by the thin-film materials. The thin-film materials are heated and the temperature is raised, accordingly. A thermally induced structural change occurs when the temperature exceedscertain threshold. In this process, the interaction between laser and materials usually involves str

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