Titlebook: Large Scale Integrated Circuits Technology: State of the Art and Prospects; Proceedings of the N Leo Esaki,Giovanni Soncini Conference proc

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Lithography Systems for VLSIThis article describes the different lithographic approaches being used to fabricate microcircuits. All approaches are directed towards reducing dimensions and packing components closer together. The accuracy with which structures can be placed is as important as how small the structures can be.

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Advanced Bipolar Devices and Related ProblemsThere exists an increasing demand for new data processing systems which feature high performance, smaller system size, low cost and high reliability.

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Large Scale Integrated Circuits Technology: State of the Art and Prospects978-94-009-7645-0Series ISSN 0168-132X

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Silicon Crystals for Large Scale Integrated Circuitsd for electronic-grade poly-crystalline silicon., which in 1980 has already exceeded 2000 tons/year (Fig. 1). The major driving force of the electronic industry is integrated circuits, which require high quality large diameter (75–125 mm) single crystalline wafers and ingots.

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Computer Simulation of Complete IC Fabrication Processon which make it possible to numerically simulate multiple diffused species -- arsenic-boron and phosphorus-boron -- as well as redistribution effects associated with moving boundaries in oxidation and epitaxy will be discussed.

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Bipolar Linear Integrated Circuitsnufacturer has always been willing to respond to customer demands and realize any given function with specific characteristics. This has resulted in the large number of integrated circuits presently available.

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Bipolar Digital Circuitsal p-n-p transistors of rather poor performance. This range of components gives the bipolar process the flexibility to make a wide variety of digital and analogue circuits on the same process, or even the same chip.

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