Titlebook: Integrated Optics, Microstructures, and Sensors; Massood Tabib-Azar Book 1995 Springer Science+Business Media New York 1995 Counter.design

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Optical Temperature Sensors benefits of fiber optics are fully realized only if the remotely located sensor is linked solely by fibers, therefore, this chapter will not discuss sensors that require electrical power connections. Fully fiber optical temperature sensors can be categorized on the basis of their signal generation

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Optical Chemical Sensorsd during the past many years. Monitoring chemical substances and processes with electromagnetic radiation has been an important tool in chemical and related sciences. Probably the most common technique in chemical analysis involving electromagnetic radiation is spectroscopy. Spectroscopic techniques

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Comparison Between Electric, Magnetic, and Optical Sensorsrce and accelerations. We consider the cantilever beam shown in Figure 1 as the sensor shell commonly used by all the sensors discussed in the present chapter. It is a simple silicon cantilever beam that is fabricated as discussed in section II. The sensing mean translates the displacement of the ca

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Comparison Between Electric, Magnetic, and Optical Sensors chapter. It is a simple silicon cantilever beam that is fabricated as discussed in section II. The sensing mean translates the displacement of the cantilever beam to a signal. The sensor shell we have described is used in a variety of sensors including atomic force and scanning tunneling microscopes.

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Mechanics of Deformable Silicon Microstructures static and dynamic behavior. Then we proceed to cover micro-bridges, diaphragms, and torsional mirrors. These simple mechanical elements are used in majority of sensors and other more elaborate structures can be analyzed using them.