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Titlebook: Gettering Defects in Semiconductors; Victor A. Perevoschikov,Vladimir D. Skoupov Book 2005 Springer-Verlag Berlin Heidelberg 2005 Getterin

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發(fā)表于 2025-3-21 17:19:34 | 只看該作者 |倒序?yàn)g覽 |閱讀模式
書目名稱Gettering Defects in Semiconductors
編輯Victor A. Perevoschikov,Vladimir D. Skoupov
視頻videohttp://file.papertrans.cn/386/385433/385433.mp4
概述Only monograph describing the current state of the art.Combines the standard techniques with the results of the author’s research
叢書名稱Springer Series in Advanced Microelectronics
圖書封面Titlebook: Gettering Defects in Semiconductors;  Victor A. Perevoschikov,Vladimir D. Skoupov Book 2005 Springer-Verlag Berlin Heidelberg 2005 Getterin
描述.Gettering Defects in Semiconductors fulfills three basic purposes:..– to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics;..– to identify new directions in research, particularly to enhance the perspective of professionals and young researchers and specialists;..– to fill a gap in the contemporary literature on the underlying semiconductor-material theory...The authors address not only well-established gettering techniques but also describe contemporary trends in gettering technologies from an international perspective. The types and properties of structural defects in semiconductors, their generating and their transforming mechanisms during fabrication are described. The primary emphasis is placed on classifying and describing specific gettering techniques, their specificity arising from both their position in a general technological process and the regimes of their application. This book addresses both engineers and material scientists interested in semiconducting materials theory and also undergraduate and graduate students in solid–state microelectronics and nanoelectronics. A comprehensive list of refer
出版日期Book 2005
關(guān)鍵詞Gettering Defects; Gettering Techniques; Microelectronic Technologies; defects; electronics; material; sem
版次1
doihttps://doi.org/10.1007/3-540-29499-6
isbn_softcover978-3-642-06570-5
isbn_ebook978-3-540-29499-3Series ISSN 1437-0387 Series E-ISSN 2197-6643
issn_series 1437-0387
copyrightSpringer-Verlag Berlin Heidelberg 2005
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Book 2005niques in microelectronics and nanoelectronics;..– to identify new directions in research, particularly to enhance the perspective of professionals and young researchers and specialists;..– to fill a gap in the contemporary literature on the underlying semiconductor-material theory...The authors add
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Physical foundations for low-temperature gettering techniques,
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978-3-642-06570-5Springer-Verlag Berlin Heidelberg 2005
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