Titlebook: Gaseous Dielectrics IX; Loucas G. Christophorou,James K. Olthoff Book 2001 Springer Science+Business Media New York 2001 Plasma.dielectric

整潔

Electron Mobility and Effective Ionization Coefficients in SF6-CO2 Mixturesuld retain many of the outstanding properties of this gas as a high voltage insulator and, at the same time being more environmentally friendly. Thus, intensive research has been carried out on SF. mixed with other gases. such as SF.-Ar, SF.-N., SF.-He, SF.-CH., SF.-CHF., and SF.-CO.. In particular,

homeostasis

Electron Transport, Ionization, and Attachment Coefficients in C2F4 and C2F4 /AR Mixturesct of electron and photon impact on c-C.F., and also as a product of thermal decomposition of c-C.F.. Consequently, dissociative processes can make C.F. a significant gas constituent. Therefore, in order to model c-C.F. plasmas, it is important to know the electron transport, ionization, and attachm

形容詞

Rate Constants for Unimolecular Decomposition of SF6tachment [.-.] and the stability of SF. with respect to decomposition in subsequent collisions with SF. [.]. It is also recognized as a potent greenhouse gas and it has been suggested that a mixture of SF. and N. might serve as a substitute for pure SF. in certain applications which require gaseous

Parley

Electron Interactions with c-C4F8, see Refs..-.). Perfluorocyclobutane is also of environmental interest because it is a global warming gas.. For these reasons, we have recently synthesized and assessed electron collision cross-section and electron transport-coefficient data for this gas.. The results of this critical assessment ar

abreast

壟斷

Ir Fluorescence of XE2 Molecules in Beam-Excited Xe Gas and AR-XE Gas Mixture at High Pressuresstudied to investigate the potentiality of rare gases as sensitive media in radiation detectors. and high energy electronic transition lasers.. In fact, rare gases have the ability to convert efficiently electron kinetic energy to electronic excitations and to convey the excitation energy to lower-l

reflection

Calculation of the Global Warming Potential for Sulfur Hexafluoride Using the Updated Atmospheric Liic lifetime for this compound. Concentrations of SF. and other trace atmospheric gases were measured at altitudes ranging from 3 to 30 kilometers (well into the stratosphere). Mesospheric air (representing air from altitudes above 50 km) was sampled from air masses moving through the polar vortices.

GIST

The use of SF6 as a Plasma Processing Gas development of plasma processing tools where both ion energy and radical fluxes can be controlled to obtain reasonable etch rates with minimal surface damage. Recent work indicates that reactive ion etching (RIE) process optimization can be achieved primarily through a consideration of plasma elect

Hearten

overture

Deposition of Plasma Polymer Films by an Atmospheric Pressure Glow Dischargeaining organic compounds for thin film deposition by plasma polymerization is well known.. These films are successfully applied for corrosion protection and as diffusion barriers2. Operating non thermal discharges under atmospheric pressure conditions requires no vacuum devices, therefore the integr