找回密碼
 To register

QQ登錄

只需一步,快速開始

掃一掃,訪問微社區(qū)

打印 上一主題 下一主題

Titlebook: Ellipsometry for Industrial Applications; Karl Riedling Book 1988 Springer-Verlag/Wien 1988 circuit.ellipsometry.film.semiconductor.surfac

[復(fù)制鏈接]
查看: 24728|回復(fù): 35
樓主
發(fā)表于 2025-3-21 19:38:44 | 只看該作者 |倒序瀏覽 |閱讀模式
書目名稱Ellipsometry for Industrial Applications
編輯Karl Riedling
視頻videohttp://file.papertrans.cn/308/307762/307762.mp4
圖書封面Titlebook: Ellipsometry for Industrial Applications;  Karl Riedling Book 1988 Springer-Verlag/Wien 1988 circuit.ellipsometry.film.semiconductor.surfac
描述During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic "in situ" measurements are suggested.
出版日期Book 1988
關(guān)鍵詞circuit; ellipsometry; film; semiconductor; surface; surface analysis; thin films
版次1
doihttps://doi.org/10.1007/978-3-7091-8961-0
isbn_softcover978-3-211-82040-7
isbn_ebook978-3-7091-8961-0
copyrightSpringer-Verlag/Wien 1988
The information of publication is updating

書目名稱Ellipsometry for Industrial Applications影響因子(影響力)




書目名稱Ellipsometry for Industrial Applications影響因子(影響力)學(xué)科排名




書目名稱Ellipsometry for Industrial Applications網(wǎng)絡(luò)公開度




書目名稱Ellipsometry for Industrial Applications網(wǎng)絡(luò)公開度學(xué)科排名




書目名稱Ellipsometry for Industrial Applications被引頻次




書目名稱Ellipsometry for Industrial Applications被引頻次學(xué)科排名




書目名稱Ellipsometry for Industrial Applications年度引用




書目名稱Ellipsometry for Industrial Applications年度引用學(xué)科排名




書目名稱Ellipsometry for Industrial Applications讀者反饋




書目名稱Ellipsometry for Industrial Applications讀者反饋學(xué)科排名




單選投票, 共有 1 人參與投票
 

0票 0.00%

Perfect with Aesthetics

 

0票 0.00%

Better Implies Difficulty

 

1票 100.00%

Good and Satisfactory

 

0票 0.00%

Adverse Performance

 

0票 0.00%

Disdainful Garbage

您所在的用戶組沒有投票權(quán)限
沙發(fā)
發(fā)表于 2025-3-21 20:41:51 | 只看該作者
板凳
發(fā)表于 2025-3-22 02:55:18 | 只看該作者
(numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic "in situ" measurements are suggested.978-3-211-82040-7978-3-7091-8961-0
地板
發(fā)表于 2025-3-22 04:48:29 | 只看該作者
5#
發(fā)表于 2025-3-22 08:52:54 | 只看該作者
6#
發(fā)表于 2025-3-22 15:05:24 | 只看該作者
in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its ac
7#
發(fā)表于 2025-3-22 18:11:07 | 只看該作者
8#
發(fā)表于 2025-3-23 00:39:39 | 只看該作者
Logic Approximating Sequences of Setschnique within the field of microelectronic technology concentrate on the investigation of semiconducting substrates and layers, and the modifications they undergo during various technological processes. In most cases, spectroscopic methods are applied.
9#
發(fā)表于 2025-3-23 03:35:42 | 只看該作者
http://image.papertrans.cn/e/image/307762.jpg
10#
發(fā)表于 2025-3-23 08:27:24 | 只看該作者
Temporal Logic: Formulas, Models, Tableaux,Ellipsometric measurements are, like any experiment, subject to various error effects which may distort their results to a more or less critical degree.
 關(guān)于派博傳思  派博傳思旗下網(wǎng)站  友情鏈接
派博傳思介紹 公司地理位置 論文服務(wù)流程 影響因子官網(wǎng) 吾愛論文網(wǎng) 大講堂 北京大學(xué) Oxford Uni. Harvard Uni.
發(fā)展歷史沿革 期刊點評 投稿經(jīng)驗總結(jié) SCIENCEGARD IMPACTFACTOR 派博系數(shù) 清華大學(xué) Yale Uni. Stanford Uni.
QQ|Archiver|手機(jī)版|小黑屋| 派博傳思國際 ( 京公網(wǎng)安備110108008328) GMT+8, 2025-10-17 16:39
Copyright © 2001-2015 派博傳思   京公網(wǎng)安備110108008328 版權(quán)所有 All rights reserved
快速回復(fù) 返回頂部 返回列表
长沙市| 黄龙县| 乌恰县| 莱州市| 巴中市| 若尔盖县| 南昌市| 徐闻县| 丹江口市| 瑞安市| 巴里| 浏阳市| 大兴区| 龙井市| 积石山| 嘉鱼县| 宜兰县| 东明县| 南部县| 邵阳县| 平罗县| 永修县| 巧家县| 河南省| 潼南县| 乌拉特后旗| 芜湖市| 高清| 远安县| 都安| 马尔康县| 耒阳市| 永德县| 志丹县| 德化县| 盐亭县| 乌兰浩特市| 西安市| 东乡县| 桑日县| 赣榆县|