Titlebook: Electrical Atomic Force Microscopy for Nanoelectronics; Umberto Celano Book 2019 Springer Nature Switzerland AG 2019 Atomic Force Microsco

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https://doi.org/10.1007/978-3-030-15612-1Atomic Force Microscope; Nanoscale materials analysis; VLSI metrology; Nanoelectronic materials; Nanoele

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Grundlagen der Steuerungstechnikon sub-μm metal oxide field-effect transistors (MOSFET) was beginning. Apparently uncorrelated, these events have positively influenced one another. In fact, ultra-scaled semiconductor devices required nanometer control of the surface quality, and the newborn microscopy techniques provided unprecede

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