Titlebook: Digital Transformation in Semiconductor Manufacturing; Proceedings of the 1 Sophia Keil,Rainer Lasch,Jacob Lohmer Conference proceedings‘‘‘

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Smart Platform for Rapid Prototyping: A First Solution Approach to Improve Time-to-Market and Procesnt of intelligent algorithms for process and equipment control as well as a novel approach for “smart experiments” to achieve an accelerated transfer of process development to ISO-certified production.