Titlebook: Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester; Shanky Saxena,Ritu Sharma,B. D. Pant Book 2021 The E

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2199-8582 n details.Includes 101 colored images to understand key tech.This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to charac

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Judy C. Woods,Stefanie S. Sebokrication technology used are discussed. Unimorph and bimorph piezoelectric layer-based designs operating in different modes are presented. Finally, the findings are summarized, and literature gaps based on low-frequency design and stable device operation are discussed.