Titlebook: Computer Simulation of Ion-Solid Interactions; Wolfgang Eckstein Book 1991 Springer-Verlag Berlin Heidelberg 1991 Computersimulation.Dynam

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Sputtering,e used, whereas in secondary neutral mass spectrometry (SNMS) some fraction of the usually dominant neutral sputtered atoms are ionized in a low-density plasma for easier detection. Lasers can be applied to ionize nearly all sputtered neutral atoms or to select specific species.

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Introduction, or may start inside the solid. Particles arriving from outside the solid are usually termed projectiles. The adjective “energetic” indicates that the particle energy ranges from the eV to the MeV region. If a projectile penetrates a solid target it will be scattered due to collisions with target at

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