Titlebook: An Introduction to Surface-Micromachining; Robert W. Johnstone,M. Parameswaran Book 2004 Springer Science+Business Media New York 2004 LIG

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Microscale Physics relativity. At very small scales, physical problems are handled using quantum mechanics. Even a small change in scale, from ordinary macroscopic object to microscopic objects, can have a great effect. While the physical forces are the same, the relative importance changes considerably. Intuition ba

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Mechanicsowever, at minimum, a grounding in structural mechanics and beams is necessary. This chapter will provide a brief introduction to the subject. More dedicated readers are referred to Timoshenko and Gere [1], a standard introduction to mechanics.

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Non-Ideal Processes when deposition occurred. The result of any processing step therefore depends heavily on the preceding steps. Managing topography is an important part of the design process. Generally, design faults relating to topography can be classified into three categories: interference faults, structural faul

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Mechanical Components[1]. Unfortunately, these techniques either do not work well in the microscale (section 4.1), or are difficult to manufacture. In particular, difficulties with large friction forces (section 4.4) and adhesion (section 4.3.5) fundamentally changes the design problem. This leads to alternate technique

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Book 2004.An Introduction to Surface-Micromachining. connects the manufacturing process, microscale phenomena, and design data to physical form and function. .This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.