| 期刊全稱 | Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators | | 影響因子2023 | Evgeni Gusev,Eric Garfunkel,Arthur Dideikin | | 視頻video | http://file.papertrans.cn/146/145890/145890.mp4 | | 發(fā)行地址 | State-of-the-art reviews from leading experts in the field of MEMS/NEMS devices and technologies.The subject is covered from different angles, including technology, device designs, processing aspects, | | 學(xué)科分類 | NATO Science for Peace and Security Series B: Physics and Biophysics | | 圖書封面 |  | | 影響因子 | A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, mat | | Pindex | Conference proceedings 2010 |
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