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標題: Titlebook: Laser Heat-Mode Lithography; Principle and Method Jingsong Wei Book 2019 Springer Nature Singapore Pte Ltd. 2019 Phase change.Thermal diffu [打印本頁]

作者: 毛發(fā)    時間: 2025-3-21 19:51
書目名稱Laser Heat-Mode Lithography影響因子(影響力)




書目名稱Laser Heat-Mode Lithography影響因子(影響力)學科排名




書目名稱Laser Heat-Mode Lithography網(wǎng)絡公開度




書目名稱Laser Heat-Mode Lithography網(wǎng)絡公開度學科排名




書目名稱Laser Heat-Mode Lithography被引頻次




書目名稱Laser Heat-Mode Lithography被引頻次學科排名




書目名稱Laser Heat-Mode Lithography年度引用




書目名稱Laser Heat-Mode Lithography年度引用學科排名




書目名稱Laser Heat-Mode Lithography讀者反饋




書目名稱Laser Heat-Mode Lithography讀者反饋學科排名





作者: 角斗士    時間: 2025-3-21 23:09
0933-033X yscale lithography, resist thin films, and pattern transfer..This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, whi
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Laser Heat-Mode Lithography on Transparent Thin Films,irectly fabricate the micro/nano-structures through traditional laser writing lithography because the laser energy cannot be absorbed due to the very low absorption coefficient of transparent thin films in writing laser wavelength.
作者: 障礙物    時間: 2025-3-22 11:54
Laser Heat-Mode Grayscale Lithography,uctural change occurs when the temperature exceedscertain threshold. In this process, the interaction between laser and materials usually involves structural changes, such as crystallization, oxidization, melting, and solidification.
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作者: Insul島    時間: 2025-3-22 18:24
0933-033X t size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advance978-981-15-0945-2978-981-15-0943-8Series ISSN 0933-033X Series E-ISSN 2196-2812
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Principles of Laser Heat-Mode Lithography,gy carrier. The lithography transfers both information and energy. On one hand, the light can transfer information into photoresists to form pattern structures based on the function of information carrier of light; on the other hand, the feature size of pattern structures can be reduced based on the
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Laser Heat-Mode Grayscale Lithography, energy is absorbed by the thin-film materials. The thin-film materials are heated and the temperature is raised, accordingly. A thermally induced structural change occurs when the temperature exceedscertain threshold. In this process, the interaction between laser and materials usually involves str
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作者: Heresy    時間: 2025-3-25 19:17
Jingsong WeiSystematically describes laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer.
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Laser Heat-Mode Lithography978-981-15-0943-8Series ISSN 0933-033X Series E-ISSN 2196-2812
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作者: Embolic-Stroke    時間: 2025-3-26 15:58
High-Speed Rotation-Type Laser Heat-Mode Lithography System,r writing system to conduct heat-mode lithography, the writing speed is slow. For example, the real velocity of traditional .–.-type vector-mode writing is only several millimeters or centimeters per second due to continuous deceleration.
作者: 外觀    時間: 2025-3-26 17:53

作者: 控制    時間: 2025-3-26 22:19
Pattern Transfer for Laser Heat-Mode Lithography,/nanostructures need to be further transferred to the substrates, such as silicon, quartz, or sapphires. The optical/electronic elements and devices can be also obtained through the pattern transfer techniques.
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